Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers
نویسندگان
چکیده
The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.
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